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June 24, 2026cs.LGcs.AImath.OCphysics.comp-phphysics.optics

Gradient-based inverse lithography for EUV masks via the waveguide method and a physics-informed neural operator

Vasiliy A. Es'kin, Egor V. Ivanov
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cs.LG, cs.AI, math.OC, physics.comp-ph, physics.optics